{"source":"book","style":"apa","contributors": [{"function":"author","last":"Geng","first":"Hwaiyu"} ],"pubtype": {"main": "pubnonperiodical"},"pubnonperiodical": {"title":"Semiconductor manufacturing handbook.","publisher":"McGraw-Hill","city":"New York","year":"2005"},"datasource":"/z-wcorg/","datasource":"http://www.worldcat.org","oclc":"840392883","isbn":"0071445595 9780071445597"}