Semiconductor manufacturing handbook (eBook, 2005) [WorldCat.org]
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Semiconductor manufacturing handbook

Author: Hwaiyu Geng
Publisher: New York : McGraw-Hill, ©2005.
Series: McGraw-Hill handbooks.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:
Annotation

This handbook will provide engineers with the principles, applications, and solutions needed to design and manage semiconductor manufacturing operations. Consolidating the many complex fields of semiconductor fundamentals and manufacturing into one volume by deploying a team of world class specialists, it allows the quick look up of specific manufacturing reference data across many subdisciplines.

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Genre/Form: Electronic books
Handbooks and manuals
Handbooks, manuals, etc
Additional Physical Format: Print version:
Semiconductor manufacturing handbook.
New York : McGraw-Hill, ©2005
(DLC) 2005045580
(OCoLC)57638591
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Hwaiyu Geng
ISBN: 0071469656 9780071469654 0071468153 9780071468152 1280918861 9781280918865 9786610918867 6610918864
OCLC Number: 61400804
Language Note: English.
Description: 1 online resource (1 volume (various pagings)) : illustrations.
Contents: pt. 1. Semiconductor fundamentals and basic materials --
pt. 2. Wafer processing --
pt. 3. Final manufacturing --
pt. 4. Nanotechnology, EMS, and FPD --
pt. 5. Gases and chemicals --
pt. 6. Fab yield, operations, and facilities.
Series Title: McGraw-Hill handbooks.
Responsibility: Hwaiyu Geng, editor in chief.
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Abstract:

Provides engineers with the principles, applications, and solutions needed to design and manage semiconductor manufacturing operations. This volume includes specific manufacturing reference data  Read more...

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