Semiconductor manufacturing handbook (Book, 2005) [WorldCat.org]
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Semiconductor manufacturing handbook

Author: Hwaiyu Geng
Publisher: New York : McGraw-Hill, ©2005.
Series: McGraw-Hill handbooks.
Edition/Format:   Print book : EnglishView all editions and formats
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Genre/Form: Handbooks and manuals
Handbooks, manuals, etc
Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Hwaiyu Geng
ISBN: 0071445595 9780071445597
OCLC Number: 57638591
Description: 1 volume (various pagings) : illustrations ; 25 cm.
Contents: How semiconductor chips are made --
IC design --
Silicon substrates for semiconductor manufacturing --
Copper, low-k dielectrics, and their reliability --
Fundamentals-silicide formation on Si --
Plasma process control --
Vacuum technology --
Photomask --
Microlithography --
Ion implantation and rapid thermal processing --
Wet etching --
Plasma etching --
Physical vapor deposition --
Chemical vapor deposition --
Epitaxy --
ECD fundamentals --
Chemical mechanical planarization --
Wet cleaning --
Inspection, measurement, and test --
Grinding, stress relief, and dicing --
Packaging --
Nanotechnology and nanomanufacturing --
Fundamentals of microelectromechanical systems --
Flat-panel display technology and manufacturing --
Specialty gas and CDA systems --
Waste gas abatement systems --
PFC abatement --
Chemical and slurry handling systems --
Fluid handling components for high purity liquid chemicals and slurries --
Fundamentals of ultrapure water --
Yield management --
Automated material handling system --
CD metrology and CD-SEM --
Six sigma --
Advanced process control --
Environmental, health, and safety (EHS) considerations in semiconductor fabrication facilities --
Plan, design, and construction of a FAB --
Cleanroom design and construction --
Micro-vibration and noise design --
ESD controls in cleanroom environments --
Airborne molecular contamination --
Particle monitoring in semiconductor manufacturing --
Wastewater neutralization systems.
Series Title: McGraw-Hill handbooks.
Responsibility: Hwaiyu Geng, editor in chief.
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Abstract:

Provides engineers with the principles, applications, and solutions needed to design and manage semiconductor manufacturing operations. This volume includes specific manufacturing reference data  Read more...

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Semiconductor Manufacturing Handbook

by hwaiyu (WorldCat user published 2007-10-23) Excellent Permalink
AAP NewsContact: Barbara Meredith Sarah WilliamsAAP/PSP (212) 255-0200 x223 or 226 bmeredith@publishers.orgASSOCIATION OF AMERICAN PUBLISHERS HONORSOUTSTANDING ACHIEVEMENTS IN PROFESSIONAL AND SCHOLARLYPUBLISHINGContinuing a 30 -Year Tradition of Honoring Excellence in Professional and ScholarlyPublishingFebruary...
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