Semiconductor manufacturing handbook (Book, 2005) []
skip to content
Semiconductor manufacturing handbook Preview this item
ClosePreview this item

Semiconductor manufacturing handbook

Author: Hwaiyu Geng
Publisher: New York : McGraw-Hill, ©2005.
Series: McGraw-Hill handbooks.
Edition/Format:   Print book : EnglishView all editions and formats

based on 1 rating(s) 1 with a review

More like this

Find a copy online

Links to this item

Find a copy in the library

&AllPage.SpinnerRetrieving; Finding libraries that hold this item...


Genre/Form: Handbooks and manuals
Handbooks, manuals, etc
Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Hwaiyu Geng
ISBN: 0071445595 9780071445597
OCLC Number: 57638591
Description: 1 volume (various pagings) : illustrations ; 25 cm.
Contents: How semiconductor chips are made --
IC design --
Silicon substrates for semiconductor manufacturing --
Copper, low-k dielectrics, and their reliability --
Fundamentals-silicide formation on Si --
Plasma process control --
Vacuum technology --
Photomask --
Microlithography --
Ion implantation and rapid thermal processing --
Wet etching --
Plasma etching --
Physical vapor deposition --
Chemical vapor deposition --
Epitaxy --
ECD fundamentals --
Chemical mechanical planarization --
Wet cleaning --
Inspection, measurement, and test --
Grinding, stress relief, and dicing --
Packaging --
Nanotechnology and nanomanufacturing --
Fundamentals of microelectromechanical systems --
Flat-panel display technology and manufacturing --
Specialty gas and CDA systems --
Waste gas abatement systems --
PFC abatement --
Chemical and slurry handling systems --
Fluid handling components for high purity liquid chemicals and slurries --
Fundamentals of ultrapure water --
Yield management --
Automated material handling system --
CD metrology and CD-SEM --
Six sigma --
Advanced process control --
Environmental, health, and safety (EHS) considerations in semiconductor fabrication facilities --
Plan, design, and construction of a FAB --
Cleanroom design and construction --
Micro-vibration and noise design --
ESD controls in cleanroom environments --
Airborne molecular contamination --
Particle monitoring in semiconductor manufacturing --
Wastewater neutralization systems.
Series Title: McGraw-Hill handbooks.
Responsibility: Hwaiyu Geng, editor in chief.
More information:


Provides engineers with the principles, applications, and solutions needed to design and manage semiconductor manufacturing operations. This volume includes specific manufacturing reference data  Read more...


User-contributed reviews

WorldCat User Reviews (1)

Semiconductor Manufacturing Handbook

by hwaiyu (WorldCat user published 2007-10-23) Excellent Permalink
AAP NewsContact: Barbara Meredith Sarah WilliamsAAP/PSP (212) 255-0200 x223 or 226 bmeredith@publishers.orgASSOCIATION OF AMERICAN PUBLISHERS HONORSOUTSTANDING ACHIEVEMENTS IN PROFESSIONAL AND SCHOLARLYPUBLISHINGContinuing a 30 -Year Tradition of Honoring Excellence in Professional and ScholarlyPublishingFebruary...
Read more... 
  • Was this review helpful to you?
Retrieving GoodReads reviews...
Retrieving DOGObooks reviews...


Be the first.
Confirm this request

You may have already requested this item. Please select Ok if you would like to proceed with this request anyway.

Close Window

Please sign in to WorldCat 

Don't have an account? You can easily create a free account.