Semiconductor manufacturing handbook (Book, 2005) [WorldCat.org]
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Semiconductor manufacturing handbook
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Semiconductor manufacturing handbook

Author: Hwaiyu Geng
Publisher: New York : McGraw-Hill, cop. 2005.
Series: McGraw-Hill handbooks
Edition/Format:   Print book : EnglishView all editions and formats
Summary:

Provides engineers with the principles, applications, and solutions needed to design and manage semiconductor manufacturing operations. This volume includes specific manufacturing reference data  Read more...

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Details

Genre/Form: Handbooks and manuals
Handbooks, manuals, etc
Guides, manuels, etc
Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Hwaiyu Geng
ISBN: 0071445595 9780071445597
OCLC Number: 492455085
Description: 1 v. (pagination multiple) : ill. ; 25 cm.
Contents: Semiconductor fundamentals and basic materials --
How semiconductor chips are made --
IC design --
Silicon substrates for semiconductor manufacturing --
Fundamentals-silicide formation on Si --
Plasma process control --
Vacuum technology --
Photomask --
Wafer processing --
Microlithography --
Ion implantation and rapid thermal processing --
Wet etching --
Plasma etching --
Physical vapor deposition --
Chemical vapor deposition --
Epitaxy --
ECD fundamentals --
Chemical mechanical planarization --
Wet cleaning --
Final manufacturing --
Inspection, measurement, and test --
Grinding, stress relief, and dicing --
Packaging --
Nanotechnology, MEMS, and FPD --
Nanotechnology and nanomanufacturing --
Fundamentals of microelectromechanical --
Flat-panel display technology and manufacturing --
Gases and chemicals --
Specialty gas and CDA systems --
Waste gas abatement systems --
PFC abatement --
Chemical and slurry handling systems --
Fluid handling components for high purity liquid chemicals and slurries --
Fundamentals of ultrapure water --
Fab yield, operations, and facilities --
Yield management --
Automated material handling system --
CD metrology and CD-SEM --
Six sigma --
Advanced process control --
Environmental, health, and safety considerations in semiconductor fabrication facilities --
Plan, design, and construction of a FAB --
Cleanroom design and construction --
Micro-vibration and noise design --
ESD controls in cleanroom environments --
Airborne molecular contamination --
Particle monitoring in semiconductor manufacturing --
Wastewater neutralization systems.
Series Title: McGraw-Hill handbooks
Responsibility: Hwaiyu Geng ... editor in chief.
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