Semiconductor manufacturing handbook (eBook, 2000) [WorldCat.org]
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Semiconductor manufacturing handbook
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Semiconductor manufacturing handbook

Author: Hwaiyu GengLin ZhouIlsun ParkK V RaviHazara S RathoreAll authors
Publisher: New York : McGraw-Hill.
Series: McGraw-Hill's AccessEngineering.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:
Annotation

This handbook will provide engineers with the principles, applications, and solutions needed to design and manage semiconductor manufacturing operations. Consolidating the many complex fields of semiconductor fundamentals and manufacturing into one volume by deploying a team of world class specialists, it allows the quick look up of specific manufacturing reference data across many subdisciplines.

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Genre/Form: Internet resources
Electronic books
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Hwaiyu Geng; Lin Zhou; Ilsun Park; K V Ravi; Hazara S Rathore; Kaushik Chanda; L P Ren; King N Tu; David J Coumou; Peter Biltoft; Charles Howard; Chris A Mack; Michael Graf; Peng Zhang; Shouliang Lai; Florian Solzbacher; Edward J McInerney; Jamal Ramdani; Giovanni Vaccari; Tom Ritzdorf; John Klocke; Timothy S Dyer; Andrew Machamer; Donald W Blair; Kazuhisa Arai; Yoshikazu Kobayashi; Hideaki Otani; Dietrich Tönnies; Michael Töpper; Zhong L Wang; Michael A Huff; David N Liu; Wayne D Curcie; Joseph D Sweeney; James C Cox; Kristin Cavicchi; Dan Barsness; Charles K Gould; David J Albrecht; Bo Li; Wayne Carriker; Clint Haris; Ram Peltinov; Mina Menaker; Bruno Scibilia; Yoan Dupret Altis; Robert H McCafferty; Brett J Davis; Steven R Trammell; Richard V Pavlotsky; Stephen C Beck; Michael Gendreau; Hal Amick; Larry Levit; Chris Muller; Steven Kochevar; Jerry Gromala; Richard E Pinkowski; IDC Corporation.
ISBN: 0071468153 9780071468152 9780071445597 0071445595
OCLC Number: 456143471
Notes: Titles from cover image and table of contents, viewed on May 4, 2007.
Print version c2005.
Description: 1 electronic text : illustrations.
Details: Mode of access: Internet.
Contents: pt. 1. Semiconductor fundamentals and basic materials --
pt. 2. Wafer processing --
pt. 3. Final manufacturing --
pt. 4. Nanotechnology, EMS, and FPD --
pt. 5. Gases and chemicals --
pt. 6. Fab yield, operations, and facilities.
Series Title: McGraw-Hill's AccessEngineering.
Other Titles: How semiconductor chips are made.
IC design.
Silicon substrates for semiconductor manufacturing.
Copper, low-k dielectrics, and their reliability.
Fundamentals of silicide formation on Si.
Plasma process control.
Vacuum technology.
Photomask.
Microlithography.
Ion implantation and rapid thermal processing.
Wet etching.
Plasma etching.
Physical vapor deposition.
Chemical vapor deposition.
Epitaxy.
ECD fundamentals.
Chemical mechanical polishing.
Wet cleaning.
Inspection, measurement, and test.
Grinding, stress relief, and dicing.
Packaging.
Nanotechnology and nanomanufacturing.
Fundamentals of microelectromechanical systems.
Flat-panel display technology and manufacturing.
Specialty gas and CDA systems.
Waste gas abatement systems.
PFC abatement.
Chemical and slurry handling systems.
Fluid handling components for high-purity liquid chemicals and slurries.
Fundamentals of ultrapure water.
Yield management.
Automated material handling system.
CD metrology and CD-SEM.
Six sigma.
Advanced process control.
Environmental, health, and safety considerations in semiconductor fabrication facilities.
Plan, design, and construction of a fab.
Cleanroom design and construction.
Micro-vibration and noise design.
ESD controls in cleanroom environments.
Airborne molecular contamination.
Particle monitoring in semiconductor manufacturing.
Wastewater neutralization systems.
Responsibility: Hwaiyu Geng, editor in chief.

Abstract:

Provides engineers with the principles, applications, and solutions needed to design and manage semiconductor manufacturing operations. This volume includes specific manufacturing reference data  Read more...

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