Ban dao ti ji cheng dian lu zhi zao shou ce (Book, 2006) [WorldCat.org]
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半导体集成电路制造手册 /
Ban dao ti ji cheng dian lu zhi zao shou ce

Author: (美)Hwaiyu Geng等著 ; 赵树武等译. 耿. 赵树武. ; ; Geng.; Zhao shu wu.
Publisher: 电子工业出版社, Bei jing : Dian zi gong ye chu ban she, 2006.
Edition/Format:   Print book : ChineseView all editions and formats
Summary:
Ben shu jie shao le you guan ban dao ti jing yuan gong yi, MEMS, Na mi ji shu he ping mian xian shi qi de zui xin xin xi, Yi ji zui xian jin de sheng chan he zi dong hua ji shu;Bao kuo liang pin lü guan li, Cai liao zi dong yun song xi tong, Jing yuan chang he jie jing shi de she ji he yun ying guan li, Qi ti qu chu he fei wu chu li guan li deng nei rong.
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Details

Document Type: Book
All Authors / Contributors: (美)Hwaiyu Geng等著 ; 赵树武等译. 耿. 赵树武. ; ; Geng.; Zhao shu wu.
ISBN: 7121032813 9787121032813
OCLC Number: 276459879
Other Titles: Semiconductor manufacturing handbook
Responsibility: Geng, zhao shu wu.

Abstract:

Ben shu jie shao le you guan ban dao ti jing yuan gong yi, MEMS, Na mi ji shu he ping mian xian shi qi de zui xin xin xi, Yi ji zui xian jin de sheng chan he zi dong hua ji shu;Bao kuo liang pin lü guan li, Cai liao zi dong yun song xi tong, Jing yuan chang he jie jing shi de she ji he yun ying guan li, Qi ti qu chu he fei wu chu li guan li deng nei rong.

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